Miniaturization of Mass Spectrometer Components and Systems Using MEMS Technology

(a) Array of µ-CIT mass spectrometers that have been successfully tested for measuring simple gases and volatile organic compounds, e.g., trichloroethylene (size 0.8 x 1 cm; 36 electrodes). (b) µ-CIT array mounted on a printed circuit board for electrical connection and testing.

The Chemical Sensors group is presently working on extreme miniaturization of mass spectrometers. To create very small mass spectrometer electrodes, microelectromechanical systems (MEMS) fabrication technology is being used. This technology is similar that used for fabrication of computer processors.

• Advantages of miniaturization of ion trap mass spectrometers
  • Low power
  • Portable

• Advantages of MEMS fabrication methods
  • High precision
  • Batch fabrication (many structures fabricated simultaneously on one wafer)

• Advantages of array approach
  • High sensitivity
  • Parallel analysis

To fully realize a handheld mass spectrometer system, the miniaturization, fabrication and integration of other mass spectrometer components such as vacuum pumps and inlet systems will be required. The Chemical Sensors group at SRI St. Petersburg is also pursuing these research areas.

List of Publications