MicroSystems Innovation Center

The MicroSystems Innovation Center (µSIC) at SRI International employs microelectromechanical systems (MEMS) fabrication processes and materials science to develop innovative micro- and nanometer-scale structures, devices, and systems to solve important problems.

Whether you are seeking R&D, technology development assistance, MEMS/NEMS, testing and evaluation of prototypes, or in-depth analysis to guide your decisions, the µSIC team can deliver. We have the facilities and the expertise to study, evaluate, and create new science and technology.

Depth and Diversity

SRI’s advantage lies in the depth and diversity of its multidisciplinary staff. No other organization can immediately field a project team with comparable expertise in biochemistry, bioengineering, biology, chemistry, electrical engineering, mechanical engineering, materials science, physics, and systems engineering, to name but a few key disciplines among our staff. Our collaborative work environment enables us to mobilize the right team for every job.

Our focus is on complete solutions to important problems. SRI develops and tests special-purpose or prototype systems, but does not manufacture or market any product, nor is it connected with any manufacturing organization. This situation permits full objectivity. As an independent, nonprofit research institute, we use a disciplined, systematic approach to applied science and engineering to maximize value for our clients.

The Center's design teams have a wealth of practical experience in many vital, real-world applications and settings:

• Automotive/Environmental: chemical and mechanical sensors for “smart” machines, solid-state electrochemical sensors for harsh environments
• Biomedical/Chemical: electrochemical and optical sensors and sensor arrays, sample collection, mass spectrometry, micro-fluidics, micro-dispensing, total analytical systems (TAS), integrating sensing systems and custom integrated circuits
• Consumer Electronics: flat-panel displays and printers
• Space Technology: ion thrusters, electronic charge management, X-ray collimators, and sensors
• Vacuum Technology: electron and ion sources, microwaves and microwave tubes, vacuum gauges, surface physics, e-beam lithography, and electron optics

SRI’s Micro- and Nanofabrication Capabilities

• Thin-film deposition: Conductive (Au, Ag, Al, Cr, Ir, Mo, Ni, Pt, Si, Sn, Ti, W, Zr, ITO, iridium oxide, etc.), dielectrics (silicon dioxide and nitride, silicon oxynitride, alumina, etc.), and polymers (polyimide, polysiloxanes, etc.)
• Self-assembled monolayers (SAM) deposition and patterning
• Thin-film patterning and lithography to submicron dimensions
• Advanced resist plating technology
• Interface/film/device characterization
• Wet and dry thin-film etching
• Reactive Ion Etch (RIE) and Deep Reactive Ion Etch (DRIE)
• Silicon processing (100 and 150 mm) and bulk micromachining
• Nonstandard substrates - Glass, plastics, ceramics, quartz - Unusual shapes (e.g., square)
• Thick-film screenprinting
• Polymer embossing
• Device packaging: wire bonding, device encapsulation, assembly
• Characterization: ellipsometry, profilometry, 4-point probe, UV-Vis-IR spectrophotometry, optical and scanning electron microscopy, X-ray analysis, atomic force microscopy

µSEC Advantages

• Experience: many of our staff are pioneers in their field, with 20 or more years experience in commercially oriented microsystem research and development
• Solutions focus: as an independent research institute, we choose the solutions that best fit your needs, not our foundry’s
• Materials flexibility: we can develop technologies in silicon, ceramics, glass, polymers, or any combination of materials that fit cost and performance objectives

Current Programs

• Microsensors
  Microsensors and microsystems development, field testing
• Vacuum Microelectronics
  Spindt cathodes, high power microwave sources, flat panel field emission displays, compact ion sources