Microsensors: Chemical

SEM image of microcylindrical ion trap array

Detecting chemical species quickly and accurately is important for a vast range of applications, from marine environments to industrial settings.

The MSEL staff uses MEMS technology to develop small-scale novel chemical sensors that provide highly sensitive sensing and fast response times.

Our current work includes:

• Chemical sensing of multiple parameters on a single chip
• Conductivity
• Temperature
• Pressure
• Oxygen
• Light level

• Microcylindrical ion trap
• Detection of chemical compounds by mass/charge differentiation
• Reduction of electronics/vacuum needs via miniaturized ion traps
• Work in collaboration with the ESD Chemical Sensing Group

• Chemical sensors using conductive polymers

Selected publications