Advanced Materials for MEMS

Honeycomb array fabricated in diamond film

As the field of MEMS fabrication methods and applications continues to grow, so does the need for new and innovative materials for MEMS device fabrication and development.

SRI's MSEL staff is continuously researching innovative approaches to advanced material processing and non-traditional materials for MEMS device development.

Our current work includes

• Diamond thin films
• Nanocrystalline diamond with smooth surfaces for lithography
• Unique optical, electronic, tribological and biological properties
• Heat-spreading advanced packaging applications
• Buffer layers for better mismatch and enhancement of diamond film properties.

• Bio-based, pre-ceramic, diamond coatings for prevention of biofouling and corrosion

• Wide-band-gap materials
• Aluminum nitride on diamond for surface acoustic wave device

Selected publications