Microsensors: Physical

Acoustic sensor array for ultrasonic imaging

Accurate measurement and knowledge of physical properties is necessary for a variety of applications from meteorology to hardware testing.

The MSEL staff uses MEMS technology to develop small-scale novel physical sensors that provide highly sensitive sensing and fast response times.

Our current work focuses on

• MEMS accelerometers

• Acoustic transducer array
• MEMS membrane and array for acoustic detection
• Transmit and receive modes
• Capacitive detection
• Medical, nondestructive evaluation (NDE), and underwater sonar applications

• Integrated weather sensing
• Temperature, relative humidity, wind speed, barometric pressure, and light intensity all measured on a single chip

Selected publications