Semiconductors

SRI's semiconductor research focuses on the high rate deposition of epitaxial and polycrystalline films of elemental and compound semiconductors using MOCVD and fluidized bed reactor CVD. We also design components for optically actuated high-power semiconductor switches. SRI's most significant advances have been made in systems for uniform illumination of these large area, high-power semiconductor switches, and use of the fluidized-bed CVD for high rate growth of solar cell silicon. Learn more about SRI's semiconductor research.
 

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Technical Contact:
Steven Crouch-Baker
(650) 859-2964
steven.crouch-baker@sri.com