Microscience + Engineering

SRI's microscience and engineering develop innovative micro- and nanometer-scale structures, sensors, and systems. Multidisciplinary teams provide technology development assistance, in-depth analysis, and MEMS design, fabrication, and characterization. The laboratory specializes in microfluidics and micro-cathodes for applications ranging from small satellites to miniature X-ray sources.

At SRI’s state-of-the-art labs and MEMS cleanrooms, staff members perform a combination of client-sponsored R&D and business development activities. SRI innovations for government agencies and clients in industry include

• Chemical and physical sensors

• Microsensors for integrated weather sensing and underwater sonar

• Infrared (THz) applications

• Vacuum microelectronics for thin displays, pulsed power devices, cathodes for spacecraft, X-ray tubes, microthrusters for satellites, and compact ion sources

• Tomographic imaging technology for medical diagnostics and research

Equipment includes:

• Contact mask aligners

• Thin-film deposition

• Etch and characterization tools

• Probe stations

• Scanning electron microscopes

• Optical microscopes