Microscience and Engineering

SRI's microscience and engineering develop innovative micro- and nanometer-scale structures, sensors, and systems. Multidisciplinary teams provide technology development assistance, in-depth analysis, and MEMS design, fabrication, and characterization. The laboratory specializes in microfluidics and micro-cathodes for applications ranging from small satellites to miniature X-ray sources.

At SRI’s state-of-the-art labs and MEMS cleanrooms, staff members perform a combination of client-sponsored R&D and business development activities. SRI innovations for government agencies and clients in industry include

  • Chemical and physical sensors

  • Microsensors for integrated weather sensing and underwater sonar

  • Infrared (THz) applications

  • Vacuum microelectronics for thin displays, pulsed power devices, cathodes for spacecraft, X-ray tubes, microthrusters for satellites, and compact ion sources

  • Tomographic imaging technology for medical diagnostics and research

Equipment includes:

  • Contact mask aligners

  • Thin-film deposition

  • Etch and characterization tools

  • Probe stations

  • Scanning electron microscopes

  • Optical microscopes

Projects

Micro-cylindrical ion trap arrays
High-Density Cylindrical Ion Trap Array Mass Spectrometer

SRI is developing small, highly sensitive arrays for pervasive monitoring of chemical and biological processes in the ocean and other environments.

Topics: Marine Science and Technology Microscience and Engineering Sensors Water Research
An SRI researcher observes FRASTA images on a computer
FRASTA: Fracture Surface Topography Analysis

SRI has developed a breakthrough technology for diagnosing and predicting fatigue failure in pipelines, aircraft, bridges, power plants, and other structures using quantitative 3D fractography.

Topics: Ceramic Composites Coatings for Corrosion Resistance Combustion Explosive Effects and Testing Fracture Physics and Failure Analysis Microscience and Engineering
chest x-ray using SRI's tomographic imaging source
Real-Time Tomosynthesis + Stationary X-Ray Source

SRI is developing technologies that could significantly improve tomographic medical imaging for cancer treatment and research.

Topics: Imaging Technologies Medical and Surgical Devices Medical Imaging Microscience and Engineering

Products + Solutions

MOCVD platter loaded for epitaxial crystal growth
Epitaxial MOCVD Growth and III-V Wafer Processing Services

SRI provides customer-focused foundry services for epitaxial growth and fabrication of compound-semiconductor optoelectronic devices.

Topics: Chemistry of Materials Microscience and Engineering Optoelectronics Semiconductor Materials
Contact
MEMS Team
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