Semiconductor Materials
Semiconductor materials form the foundation of most modern electronics, including radio, computers, and telephones. Devices can use transistors, solar cells, diodes, silicon-controlled rectifiers, and digital and analog integrated circuits.
SRI’s significant advances in semiconductor materials include systems for uniform illumination of large area, high-power semiconductor switches. We also use fluidized-bed Chemical Vapor Deposition (CVD) for high-rate growth of solar cell silicon.
Our research in semiconductor materials includes:
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High-rate deposition of epitaxial and polycrystalline films of elemental and compound semiconductors using metal-organic chemical vapor deposition (MOCVD) and fluidized bed reactor CVD
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Design components for optically actuated, high-power semiconductor switches
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Recycling of fluorine during semiconductor manufacturing to meet environmental concerns and minimize production costs
