{"id":95412,"date":"2025-02-13T19:00:00","date_gmt":"2025-02-14T00:00:00","guid":{"rendered":"https:\/\/www.sri.com\/?p=95412"},"modified":"2025-02-13T05:13:01","modified_gmt":"2025-02-13T10:13:01","slug":"%e6%ac%a1%e4%b8%96%e4%bb%a3%e3%81%ae%e3%82%a8%e3%83%ac%e3%82%af%e3%83%88%e3%83%ad%e3%83%8b%e3%82%af%e3%82%b9%e3%82%92%e6%a7%8b%e7%af%89%e3%81%99%e3%82%8b","status":"publish","type":"post","link":"https:\/\/www.sri.com\/ja\/press\/story\/%e6%ac%a1%e4%b8%96%e4%bb%a3%e3%81%ae%e3%82%a8%e3%83%ac%e3%82%af%e3%83%88%e3%83%ad%e3%83%8b%e3%82%af%e3%82%b9%e3%82%92%e6%a7%8b%e7%af%89%e3%81%99%e3%82%8b\/","title":{"rendered":"\u6b21\u4e16\u4ee3\u306e\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3092\u69cb\u7bc9\u3059\u308b"},"content":{"rendered":"\n<div class=\"wp-block-group has-global-padding is-layout-constrained wp-block-group-is-layout-constrained\">\n<figure class=\"wp-block-image aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1920\" height=\"1080\" src=\"https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main.jpg\" alt=\"\" class=\"wp-image-93122\" style=\"width:906px;height:auto\" srcset=\"https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main.jpg 1920w, https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main-300x169.jpg 300w, https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main-1024x576.jpg 1024w, https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main-768x432.jpg 768w, https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main-1536x864.jpg 1536w, https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main-500x281.jpg 500w, https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main-800x450.jpg 800w, https:\/\/www.sri.com\/wp-content\/uploads\/2024\/09\/Semiconductors_main-1280x720.jpg 1280w\" sizes=\"auto, (max-width: 1920px) 100vw, 1920px\" \/><figcaption class=\"wp-element-caption\">\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u3067\u5fae\u7d30\u52a0\u5de5\u5de5\u7a0b\u306b\u4f7f\u7528\u3055\u308c\u308b\u91cd\u8981\u306a\u90e8\u54c1\u306e\u300c\u30d5\u30a9\u30c8\u30de\u30b9\u30af\u300d\u3092\u691c\u54c1\u3059\u308bSRI\u306e\u30a8\u30f3\u30b8\u30cb\u30a2<\/figcaption><\/figure>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-dashed-sep-1\"\/>\n\n\n\n<h2 class=\"wp-block-heading has-text-align-center\">SRI\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306f\u3001\u65b0\u3057\u3044\u30c7\u30d0\u30a4\u30b9\u3084\u30d7\u30ed\u30c8\u30bf\u30a4\u30d7\u958b\u767a\u304b\u3089\u3001\u5c02\u9580\u5bb6\u3068\u306e\u5171\u540c\u4f5c\u696d\u3001\u5c0f\u898f\u6a21\u306e\u751f\u7523\u307e\u3067\u3082\u30af\u30e9\u30a4\u30a2\u30f3\u30c8\u306b\u63d0\u4f9b<\/h2>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity is-style-dashed-sep-1\"\/>\n\n\n\n<p>\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u3042\u3075\u308c\u305f\u73fe\u4ee3\u793e\u4f1a\u3067\u3001\u534a\u5c0e\u4f53\u306f\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3063\u3066\u3044\u307e\u3059\u3002\u534a\u5c0e\u4f53\u306f\u643a\u5e2f\u96fb\u8a71\u3084\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u30fc\u306a\u3069\u306e\u96fb\u5b50\u6a5f\u5668\u306e\u5fc3\u81d3\u90e8\u3067\u3042\u308a\u3001\u60c5\u5831\u3092\u53d7\u4fe1\u3057\u3066\u51e6\u7406\u3057\u3001\u4fdd\u5b58\u3057\u3066\u3044\u307e\u3059\u3002\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u5de5\u7a0b\u306f\u53b3\u683c\u306a\u5236\u5fa1\u304c\u5fc5\u8981\u3067\u3001\u4e88\u60f3\u5916\u306e\u5206\u5b50\u30ec\u30d9\u30eb\u306e\u3082\u306e\u304c\u307b\u3093\u306e\u308f\u305a\u304b\u6df7\u5165\u3059\u308b\u3060\u3051\u3067\u3082\u3001\u534a\u5c0e\u4f53\u3068\u3057\u3066\u306e\u7279\u6027\u304c\u5909\u5316\u3057\u3066\u30c1\u30c3\u30d7\u306e\u6027\u80fd\u304c\u5909\u308f\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>SRI\u306ePrincipal Research Scientist\u3067\u3001\u30de\u30a4\u30af\u30ed\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30b0\u30eb\u30fc\u30d7\u306e\u30b7\u30cb\u30a2\u30de\u30cd\u30fc\u30b8\u30e3\u30fc\u3067\u3042\u308b<a href=\"https:\/\/www.sri.com\/people\/christopher-chua\/\">Christopher Chua<\/a>\u306f\u3001\u300c\u3053\u308c\u3089\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u5316\u5b66\u7684\u306a\u4e0d\u7d14\u7269\u3084\u7269\u7406\u7684\u306a\u4e0d\u7d14\u7269\u306b\u5bfe\u3057\u3066\u975e\u5e38\u306b\u654f\u611f\u3067\u3059\u3002\u79c1\u305f\u3061\u306f\u975e\u5e38\u306b\u5c0f\u3055\u306a\u3082\u306e\u3092\u4f5c\u308d\u3046\u3068\u3057\u3066\u304a\u308a\u3001\u5875\u304c\uff11\u3064\u3067\u3082\u4e88\u671f\u3057\u306a\u3044\u5834\u6240\u306b\u843d\u3061\u305f\u3089\u3001\u56de\u8def\u5168\u4f53\u304c\u6a5f\u80fd\u3057\u306a\u304f\u306a\u308b\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002\u6c34\u304b\u3089\u7a7a\u6c17\u306b\u81f3\u308b\u307e\u3067\u5168\u3066\u3092\u5236\u5fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u300d\u3068\u8ff0\u3079\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>SRI\u306f\u534a\u5c0e\u4f53\u5fae\u7d30\u52a0\u5de5\u7528\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u65bd\u8a2d\u3092\uff11\u30ab\u6240\u306b\u96c6\u7d04\u3057\u3066\u304a\u308a\u3001\u7814\u7a76\u8005\u305f\u3061\u306f\u3053\u3053\u3067\u65b0\u3057\u3044\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u3084\u305d\u306e\u88fd\u9020\u5de5\u7a0b\u306e\u958b\u767a\u3001\u30d7\u30ed\u30c8\u30bf\u30a4\u30d7\u306e\u4f5c\u6210\u3001\u305d\u3057\u3066\u65b0\u6280\u8853\u306e\u5546\u696d\u751f\u7523\u79fb\u884c\u307e\u3067\u624b\u639b\u3051\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u306e\u65bd\u8a2d\u306fSRI\u306e\u7814\u7a76\u8005\u304c\u4f7f\u7528\u3057\u3066\u3044\u307e\u3059\u304c\u3001\u30af\u30e9\u30a4\u30a2\u30f3\u30c8\u3082\u88fd\u54c1\u958b\u767a\u3084\u5c0f\u898f\u6a21\u306e\u751f\u7523\u306b\u5229\u7528\u3067\u304d\u307e\u3059\u3002\u4f8b\u3092\u3042\u3052\u308b\u3068\u3001\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5(atomic layer deposition)\u3084\u5869\u7d20\u7cfbICP(chlorine-based ICP)\u3001\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u306e\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577(ultra-wide bandgap epitaxial growth)\u3001\u30c9\u30fc\u30d7\u3055\u308c\u305f\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u306e\u30d7\u30e9\u30ba\u30deCVD\u3001\u6e1b\u5727CVD\u3001\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u3092\u4f7f\u7528\u3057\u3066\u30c9\u30fc\u30d1\u30f3\u30c8\u6d3b\u6027\u5316\u3092\u6d45\u304f\u3059\u308b\u3053\u3068\u7b49\u304c\u3067\u304d\u3001ITO\u3084\u8d85\u4f1d\u5c0e\u7d20\u6750\u3092\u7269\u7406\u7684\u306b\u6210\u819c\u3059\u308b\u3053\u3068\u3082\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u591a\u69d8\u306a\u30c1\u30c3\u30d7\u30d7\u30ed\u30bb\u30b9\u306b\u5bfe\u5fdc\u3067\u304d\u308b\u3001\u5148\u9032\u7684\u306a\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0<\/h2>\n\n\n\n<p>\u300c\u5927\u534a\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306e\u30b5\u30fc\u30d3\u30b9\u3067\u306f\u3001\u8584\u819c\u84b8\u7740\u3084\u30a6\u30a8\u30cf\u30fc\u8584\u7247\u5316\u306a\u3069\u3001\u5358\u4e00\u306e\u5fae\u7d30\u52a0\u5de5\u5de5\u7a0b\u3057\u304b\u63d0\u4f9b\u3057\u3066\u3044\u307e\u305b\u3093\u304c\u3001\u3053\u3053\u30d1\u30ed\u30a2\u30eb\u30c8\u3067\u306f\u3001\u5fae\u7d30\u52a0\u5de5\u5de5\u7a0b\u306e\u5168\u57df\u3092\u7db2\u7f85\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u3092\u30ab\u30b9\u30bf\u30e0\u5316\u3057\u3066\u63d0\u4f9b\u3057\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u591a\u7a2e\u591a\u69d8\u306a\u30ce\u30a6\u30cf\u30a6\u3068\u88c5\u7f6e\u3092\uff11\u30ab\u6240\u306b\u96c6\u3081\u3066\u3044\u308b\u306e\u3067\u3059\u3002\u79c1\u305f\u3061\u306f\u30af\u30e9\u30a4\u30a2\u30f3\u30c8\u3068\u5354\u529b\u3057\u3066\u3001\u4f55\u304c\u5fc5\u8981\u3068\u3055\u308c\u3066\u3044\u308b\u304b\u3092\u628a\u63e1\u3057\u305f\u3046\u3048\u3067\u65b0\u3057\u3044\u7279\u6b8a\u306a\u5de5\u7a0b\u3092\u5171\u540c\u958b\u767a\u3057\u3001\u201d\u30d7\u30ed\u30c8\u30bf\u30a4\u30d7\u958b\u767a\u201d\u3068\u201d\u30e9\u30dc\u304b\u3089\u5de5\u5834\u3078\u306e\u79fb\u884c\u201d\u306e\u4e21\u65b9\u3092\u652f\u63f4\u3057\u307e\u3059\u300d\u3068Chua\u306f\u8ff0\u3079\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307b\u3068\u3093\u3069\u306e\u534a\u5c0e\u4f53\u306f\u591a\u304f\u306e\u5de5\u7a0b\u3092\u7d4c\u3066\u88fd\u9020\u3055\u308c\u3066\u304a\u308a\u3001\u3072\u3068\u3064\u3072\u3068\u3064\u306e\u5de5\u7a0b\u304c\u6b21\u306e\u5de5\u7a0b\u306b\u5f71\u97ff\u3092\u53ca\u307c\u3057\u307e\u3059\u3002\u554f\u984c\u304c\u767a\u751f\u3059\u308b\u3068\u3001\u5fae\u7d30\u52a0\u5de5\u5de5\u7a0b\u306e\u4e00\u3064\u3060\u3051\u3092\u8abf\u6574\u3057\u3066\u3082\u4e0d\u5341\u5206\u3067\u3059\u3002SRI\u306e\u7814\u7a76\u8005\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u7269\u7406\u7684\u5074\u9762\u3084\u7d20\u6750\u3001\u305d\u3057\u3066\u305d\u306e\u80fd\u529b\u3092\u7dcf\u5408\u7684\u306b\u3068\u3089\u3048\u3001\u591a\u304f\u306e\u5de5\u7a0b\u5168\u4f53\u3092\u6700\u9069\u5316\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-pullquote is-style-machina-pullquote has-large-font-size\"><blockquote><p>\u300c\u30d1\u30ed\u30a2\u30eb\u30c8\u3067\u306f\u3001\u5fae\u7d30\u52a0\u5de5\u5de5\u7a0b\u306e\u5168\u57df\u3092\u7db2\u7f85\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u3092\u30ab\u30b9\u30bf\u30e0\u5316\u3057\u3066\u63d0\u4f9b\u3057\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u591a\u7a2e\u591a\u69d8\u306a\u88c5\u7f6e\u3092\uff11\u30ab\u6240\u306b\u96c6\u3081\u3066\u3044\u308b\u306e\u3067\u3059\u300d\u2015Christopher Chua<\/p><\/blockquote><\/figure>\n\n\n\n<p>\u300c\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u3084\u305d\u306e\u88fd\u9020\u5de5\u7a0b\u3092\u958b\u767a\u3059\u308b\u5834\u5408\u306f\u3001\u5de5\u7a0b\u3084\u7d20\u6750\u3092\u52b9\u7387\u7684\u306b\u8abf\u6574\u3059\u308b\u4f53\u5236\u304c\u793e\u5185\u306b\u5099\u308f\u3063\u3066\u3044\u307e\u3059\u3002\u524d\u4f8b\u306e\u306a\u3044\u3053\u3068\u306b\u6311\u6226\u3059\u308b\u3068\u304d\u306f\u3001\u30ab\u30b9\u30bf\u30e0\u5316\u3057\u305f\u88c5\u7f6e\u3092\u4f5c\u308b\u3053\u3068\u3082\u3088\u304f\u3042\u308a\u307e\u3059\u300d\u3068Chua\u306f\u8ff0\u3079\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h2 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