Amorphous silicon thin film transistor image sensors


Street, R. A.; Wong, W. S.; Ng, T.; Lujan, R. A. Amorphous silicon thin film transistor image sensors. Philosophical Magazine. 2009 October; 89 (28 – 30): 2687-2697.


Amorphous silicon thin film transistors are the underlying technology for flat panel displays and medical x-ray imaging. We describe some developments of the TFT technology for high performance detectors and flexible image sensors that have occurred in recent years. X-ray detectors with high gain now make it possible to detect the ionization tracks of individual x-rays and provide a new approach to neutron imaging. Development of the amorphous silicon deposition process makes it possible to fabricate image sensor arrays on plastic substrates.

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