High-Index-Contrast AlGaAs Waveguide Scattering Loss Reduction Via Oxidation Smoothing of Sidewall Roughness

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C. S. Seibert, D. Liang, D. C. Hall, and Z. A. Shellenbarger, “High-Index-Contrast AlGaAs Waveguide Scattering Loss Reduction Via Oxidation Smoothing of Sidewall Roughness,” in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper JTuA22.

Abstract

The propagation loss of single mode high index contrast AlGaAs ridge waveguides is reduced nearly three orders of magnitude (at 1 cm guide length) through application of a nonselective wet oxidation sidewall roughness smoothing technique.

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