Surface analysis by laser ionization (SALI)

Surface analysis by laser ionization (SALI) – 1984

In 1984, SRI developed Surface Analysis by Laser Ionization (SALI), now a standard method for analyzing metals, semiconductors, composites, ceramics, and polymers.

With SALI, laser ionization is coupled with state-of-the-art time-of-flight mass spectrometry to provide extremely sensitive, general and readily quantifiable surface analysis. The technology is used by the semiconductor industry and is used for the analysis of the near-surface region of specially pretreated stainless steels.

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