Fabrication of vanadium oxide microbolometers on thin polyimide films

Citation

De Bruyker, D. Fabrication of vanadium oxide microbolometers on thin polyimide films. 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013); 2013 June 16-20; Barcelona, Spain. Piscataway, NJ: IEEE; 2013; 62-65.

Abstract

We report the fabrication and characterization of thin film vanadium oxide microbolometer detector elements on thin (12.5 um) polyimide films. The microbolometer detectors have been designed and are being evaluated for use in scanning radiometers aboard a satellite. Preliminary characterization results (nominal resistance, temperature coefficient, thermistor noise) are reported.

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